Furnace
EM-12C: 12 zone 1100 ◦ C, split tubular furnace
Number of independently controlled zone | 12 |
Length of each zone | 75 mm |
Total hot zone length | 900 mm |
Heating element | Kanthal-A1 |
Temperature sensor | N-type thermocouple |
Mass Flow Controller
EM-203 : 0 – 1000 sccm flow
Supported gases | Nitrogen, oxygen, hydrogen, helium, argon, air, and methane |
Flow | 0 – 1000 sccm |
Setpoint resolution | Better than 0.05% of the full-scale |
Flushing | A flow of 5000 sccm or more is provided with an on/off valve, installed in parallel to the MFC |
MFC shutoff | Shut-off is ensured with another on/off valve installed in series with the MFC and flush valve |
Purge | The tube outlet has an on/off valve |
QRYSTAL monitoring
User interface and recipe editor
• The system has an embedded control software, named Qrystal, to display and control the
following parameters of the system.
– Zone temperature as pseudo-colored bar graph
– Process tube pressure (i.e. Pirani and gauge pressure)
– MFC inlet pressure
– MFC flow setpoint and actual flow
– Real-time plots
– Flush and flow shut-off status
– Pump control
– Purge control
– Recipe load, edit, save, and run control
• User can program their recipe using Python scripts
• Advanced user can use SDK to develop custom applications for remote monitoring and
control using Modbus TCP/IP over LAN.
Vacuum system
QRY-830: 10^-3 mbar CVD vacuum system
QRY-141 vacuum components | – Process tube coupling with reusable filters – Vacuum level sensors: Pirani gauge and Linear sensor – Chamber isolation: Butterfly valve – Release valve – Purge valve |
STD-VP-103-250: Double stage rotary vane vacuum pump | – Two stage rotary pump – Throughput: 15 m^3/hr – Ultimate vacuum: Better than 10^-2 mbar |