Chemical Vapour Deposition Systems

QrystalTM is a fully automated research grade chemical vapour deposition system, with 12 independent temperature zones (divisible into 1, 2, or 3 zones on the fly), each capable of reaching temperatures upto 1200 °C. It has an inbuilt precision mass flow controller allowing controlled injection of upto 4 gases. A back pressure regulator allows a fixed controlled pressure to be maintained throughout the deposition chamber.

Product Info

The QRYSTAL: Chemical Vapour Deposition system was launched by Quazar Tech in 2018 and has already been deployed at the top research facilities across the country.
Researchers can take advantage of the modular nature of QRYSTAL to build a system as per their research program or procure recipes along with application specific systems kickstarting their research from day 1 of the installation

Transition metal dichalcogenides system
MoS2 optical 		Graphene/CNT systems
Graphene STM large area scan

Specifications

Detailed specifications sheet can be downloaded here. Click on the modules to see their specifications

EM-12C: 12 zone 1100 ◦ C, split tubular furnace

Number of independently controlled zone12
Length of each zone75 mm
Total hot zone length900 mm
Heating elementKanthal-A1
Temperature sensorN-type thermocouple

Installations

The QRYSTAL system is part of the research facilities at the following locations

  • Advanced Science and Technology Lab, Vinoba Bhave University
  • Functional Materials and Devices Laboratory, IIT Delhi
  • Department of Physics, Vidyasagar Univerity
  • Department of Electrical Engineering, IIT Kanpur
  • Nano-Technology Lab, BIT Sindri
  • 2 systems at NRF, IIT Delhi for Graphene and TMDC

Publications

  1. Md Samim Reza, Aman Abhishek Tiwari, Deshdeep Sahdev, Madhusudan Singh; Growth of large edge length two-dimensional using a custom 12-zone atmospheric pressure chemical vapor deposition system. J. Vac. Sci. Technol. A 1 January 2024; 42 (1): 012701. https://doi.org/10.1116/6.0002985
  2. Investigation of growth dynamics of β-Ga2O3 LPCVD by independently controlling Ga precursor and substrate temperature Gavax Joshi et al 2023 Jpn. J. Appl. Phys. 62 SF1017
  3. Large and Uniform Single Crystals of MoS2 Monolayers for ppb-Level NO2 Sensing Chandrabhan Patel, Ruchi Singh, Mayank Dubey, Sushil Kumar Pandey, Shrish Nath Upadhyay, Vikash Kumar, Sharath Sriram, Myo Than Htay, Srimanta Pakhira, Victor V. Atuchin, and Shaibal Mukherjee ACS Applied Nano Materials 2022 5 (7), 9415-9426 DOI: 10.1021/acsanm.2c01701
  4. M. S. Reza, S. Kumar, H. S. Devi, P. Akhtar and M. Singh, "Growth of two-dimensional high-quality large edge length WS2," 2020 5th IEEE International Conference on Emerging Electronics (ICEE), New Delhi, India, 2020, pp. 1-4, doi: 10.1109/ICEE50728.2020.9776733.
  5. Das, S. K., Sahoo, U. P., Das, B., Ghorai, G., Samal, P., Sahoo, P. K., Defect Induced Unconventional Ferromagnetism in Au Intercalated Bi2Se3 Nanocrystals for Spintronic Applications. Adv Quantum Technol. 2023, 6, 2300169. https://doi.org/10.1002/qute.202300169
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