QrystalTM is a fully automated research grade chemical vapour deposition system, with 12 independent temperature zones, each capable of reaching temperatures upto 1150 °C. It has an inbuilt precision mass flow controller allowing controlled injection of upto 4 gases. A back pressure regulator allows a fixed controlled pressure to be maintained throughout the deposition chamber.
Product Info
The QRYSTAL: Chemical Vapour Deposition system was launched by Quazar Tech in 2018 and has already been deployed at the top research facilities across the country. Researchers can take advantage of the modular nature of QRYSTAL to build a system as per their research program or procure recipes along with application specific systems kickstarting their research from day 1 of the installation
Detailed specifications sheet can be downloaded here. Click on the modules to see their specifications
EM-12C: 12 zone 1100 ◦ C, split tubular furnace
Number of independently controlled zone
12
Length of each zone
75 mm
Total hot zone length
900 mm
Heating element
Kanthal-A1
Temperature sensor
N-type thermocouple
EM-203 : 0 – 1000 sccm flow
Supported gases
Nitrogen, oxygen, hydrogen, helium, argon, air, and methane
Flow
0 – 1000 sccm
Setpoint resolution
Better than 0.05% of the full-scale
Flushing
A flow of 5000 sccm or more is provided with an on/off valve, installed in parallel to the MFC
MFC shutoff
Shut-off is ensured with another on/off valve installed in series with the MFC and flush valve
Purge
The tube outlet has an on/off valve
Liquid precursor vapouriser
Liquid volume
20 ml
Container material
Quartz
Elastomers
Teflon and viton
Maximum operating temperature
200 C
Temperature setpoint resolution
1 C
Temperature stability
Better than 0.1 C
MFC flow-rate
100 sccm or 1000 sccm
Flow modes
Bypass, bubbling, head-space sampling
Transfer line
Heated
Isolation
An on/off valve ensures LPV is completely cut- off when not in use
User interface and recipe editor
• The system has an embedded control software, named Qrystal, to display and control the following parameters of the system. – Zone temperature as pseudo-colored bar graph – Process tube pressure (i.e. Pirani and gauge pressure) – MFC inlet pressure – MFC flow setpoint and actual flow – Real-time plots – Flush and flow shut-off status – Pump control – Purge control – Recipe load, edit, save, and run control • User can program their recipe using Python scripts • Advanced user can use SDK to develop custom applications for remote monitoring and control using Modbus TCP/IP over LAN.
QRY-830 : 10^3 mbar CVD vacuum system
QRY-141 vacuum components
Process tube vacuum coupling with replaceable filters
Vacuum level sensor (mounted at the end of the process tube): – Pirani gauge (10 −3 to 0.5 mbar) – Linear sensor: 0.1 mbar to 1000 mbar
Chamber isolation: Butterfly valve
Release valve
Purge valve
STD-VP-103-250 : Double stage rotary vane vacuum
Pump type: Two stage rotary pump
Pump throughput: 15 m 3 /hour
Ultimate vacuum: Better than 10 −2 mbar
EE-102 12-channel temperature controller
Temperature setpoint resolution: 0.1 ◦ C
Isothermal temperature stability: Better than 0.1 ◦ C
Maximum temperature – Transient: 1150 ◦ C – Continuous: 1100 ◦ C
Maximum ramp-rate at full-power. – Better than 100 ◦ C/min. up to 300 ◦ C – Better than 50 ◦ C/min. up to 600 ◦ C – Better than 10 ◦ C/min. up to 900 ◦ C – Better than 5 ◦ C/min. at maximum temperature
Installations
The QRYSTAL system is part of the research facilities at the following locations
Advanced Science and Technology Lab, Vinoba Bhave University
Functional Materials and Devices Laboratory, IIT Delhi
Department of Physics, Vidyasagar Univerity
Department of Electrical Engineering, IIT Kanpur
Nano-Technology Lab, BIT Sindri
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