QrystalTM is a research grade chemical vapour deposition system, with 12 independent temperature zones, each capable of reaching temperatures upto 1150 °C. It has an inbuilt precision mass flow controller allowing controlled injection of upto 4 gases. A back pressure regulator allows a fixed controlled pressure to be maintained throughout the deposition chamber.
Product Info
Specifications
Furnace : QBAKE-1100-3
- Independent Heating Zones : 12
- Maximum Temperature : 1150 °C for transient, 1100 °C for continuous operation
- Uniform Temperature Zone Length : 200 mm
- Temperature Uniformity : Better than ±5 °C within a zone
- Heater Wire Material : Kanthal
- Process Tube Material : Quartz
- Process Tube Diameter : ID = 45 mm, OD = 48 mm
- Embedded Temperature Sensor : K-type Thermocouple
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Temperature Controller : TCON-12
- Sensor Channels : 16
- Sensor Type : K-type Thermocouple (or PT100)
- Independent Control Loops : 12
- Control Algorithm : Floating Point P-I-D
- Temperature Stability : Better than 0.1 °C
- PID Auto-tune : Yes
- Heater Drive : 220V, 50 Hz
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Vacuum System : VAC-10E-2
- Pump Type : 2-stage, Rotary Pump
- Pump Throughput : 15 m3/hour
- Ultimate Vacuum : 10m-3 mBar
- Vacuum Sensor : Pirani Gauge and ±15 psi tube pressure sensor mounted at the end of the quartz tube
- Chamber Isolation : Butterfly Valve
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Mass Flow Controller : MF02
- Number of Channels : 4
- Channel 1, 2 : 0-1000 sccm
- Auxilliary Valves : 2/channel, one in series for true shutoff, one in parallel for flushing
- Flow Stability : Better than 0.1% of full scale
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Documents
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